Crucial Issues in Semiconductor Materials and Processing Technologies (Hardcover, 1992 ed.)

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

General

Imprint:	Springer
Country of origin:	Netherlands
Series:	NATO Science Series E:, 222
Release date:	October 1992
First published:	1992
Editors:	S. Coffa • F. Priolo • Emanuele Rimini • J.M. Poate
Dimensions:	235 x 155 x 31mm (L x W x T)
Format:	Hardcover
Pages:	538
Edition:	1992 ed.
ISBN-13:	978-0-7923-2003-6
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
LSN:	0-7923-2003-4
Barcode:	9780792320036

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