This accessible text is now fully revised and updated, providing an
overview of fabrication technologies and materials needed to
realize modern microdevices. It demonstrates how common
microfabrication principles can be applied in different
applications, to create devices ranging from nanometer probe tips
to meter scale solar cells, and a host of microelectronic,
mechanical, optical and fluidic devices in between. Latest
developments in wafer engineering, patterning, thin films, surface
preparation and bonding are covered.
This "second edition" includes: expanded sections on MEMS and
microfluidics related fabrication issuesnew chapters on polymer and
glass microprocessing, as well as serial processing techniques200
completely new and 200 modified figuresmore coverage of imprinting
techniques, process integration and economics of
microfabrication300 homework exercises including conceptual
thinking assignments, order of magnitude estimates, standard
calculations, and device design and process analysis
problemssolutions to homework problems on the complementary
website, as well as PDF slides of the figures and tables within the
book
With clear sections separating basic principles from more
advanced material, this is a valuable textbook for senior
undergraduate and beginning graduate students wanting to understand
the fundamentals of microfabrication. The book also serves as a
handy desk reference for practicing electrical engineers, materials
scientists, chemists and physicists alike.
www.wiley.com/go/Franssila_Micro2e
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