Introduction to Microfabrication 2e (Hardcover, 2nd Edition)

This "second edition" includes: expanded sections on MEMS and microfluidics related fabrication issuesnew chapters on polymer and glass microprocessing, as well as serial processing techniques200 completely new and 200 modified figuresmore coverage of imprinting techniques, process integration and economics of microfabrication300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problemssolutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book

With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.

www.wiley.com/go/Franssila_Micro2e

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