The tremendous growth and development in modern information and
communication technology have been made possible due to the rapid
advances in the fields of microelectronics and photonics. The area
of microelectronics deals with the study and development of
semiconductor-based electronic components and circuits of very
small size starting from the micrometer to nanometer scale. This
book examines and presents recent developments in the semiconductor
devices for future generation microelectronics and photonics
technologies. It includes some advanced CMOS device structures for
future generation nanoscale IC technology, microdevices for
pressure sensors, source and detectors for photonic applications
and lithography process for nanoscale fabrication.
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