MEMS based micropropulsion devices are becoming highly demanding
for the repositioning of micro/nano satellites. Microthruster is
the solution for the re-orbiting of small satellites whereas the
microvalve controls the propellant flow and micropump keeps the
propellant pressure constant. The microvalve consists of a silicon
membrane, two holes made in silicon wafer and a commercially
available piezoelectric stack. The silicon membrane has a boss tip
at the center of top side and is structured using conventional KOH
bulk micromachining.The membrane is directly attached to the
piezoelectric stack actuator which moves in an out-of-plane motion
against the bottom structure.The microvalve developed here is a
normally closed, low cost, capable of controlling the flow of gases
as well as liquids, leak tight and can be used for high pressure
application. The micropump developed and presented in this
dissertation is silicon based valveless diffuser /nozzle elements
to rectify the fluid flow. Piezoelectric actuation is used in this
case for diaphragm vibration. This book presents the detail design
and development procedures of those devices with satisfactory test
results.
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