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Books > Professional & Technical > Energy technology & engineering > Fossil fuel technologies > Gas technology
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MEMS and Nanotechnology for Gas Sensors (Hardcover)
Loot Price: R4,473
Discovery Miles 44 730
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MEMS and Nanotechnology for Gas Sensors (Hardcover)
Expected to ship within 12 - 19 working days
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How Can We Lower the Power Consumption of Gas Sensors? There is a
growing demand for low-power, high-density gas sensor arrays that
can overcome problems relative to high power consumption. Low power
consumption is a prerequisite for any type of sensor system to
operate at optimum efficiency. Focused on fabrication-friendly
microelectromechanical systems (MEMS) and other areas of sensor
technology, MEMS and Nanotechnology for Gas Sensors explores the
distinct advantages of using MEMS in low power consumption, and
provides extensive coverage of the MEMS/nanotechnology platform for
gas sensor applications. This book outlines the microfabrication
technology needed to fabricate a gas sensor on a MEMS platform. It
discusses semiconductors, graphene, nanocrystalline ZnO-based
microfabricated sensors, and nanostructures for volatile organic
compounds. It also includes performance parameters for the state of
the art of sensors, and the applications of MEMS and nanotechnology
in different areas relevant to the sensor domain. In addition, the
book includes: An introduction to MEMS for MEMS materials, and a
historical background of MEMS A concept for cleanroom technology
The substrate materials used for MEMS Two types of deposition
techniques, including chemical vapour deposition (CVD) The
properties and types of photoresists, and the photolithographic
processes Different micromachining techniques for the gas sensor
platform, and bulk and surface micromachining The design issues of
a microheater for MEMS-based sensors The synthesis technique of a
nanocrystalline metal oxide layer A detailed review about graphene;
its different deposition techniques; and its important electronic,
electrical, and mechanical properties with its application as a gas
sensor Low-cost, low-temperature synthesis techniques An
explanation of volatile organic compound (VOC) detection and how
relative humidity affects the sensing parameters MEMS and
Nanotechnology for Gas Sensors provides a broad overview of
current, emerging, and possible future MEMS applications. MEMS
technology can be applied in the automotive, consumer, industrial,
and biotechnology domains.
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