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Free-Standing Thick-Film Piezoelectric Cantilevers -Energy Harvesting (Paperback)
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Free-Standing Thick-Film Piezoelectric Cantilevers -Energy Harvesting (Paperback)
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Vibration-based energy harvesting is one of the attractive
solutions for powering autonomous microsystems, due to the fact
that, vibration sources are ubiquitous in the ambient environment.
Basically, the vibration-to-electricity conversion mechanism can be
implemented by piezoelectric, electromagnetic, electrostatic, and
magnetostrictive transductions. In this book, piezoelectric
transduction is investigated due to its high electrical output
density, compatibility with conventional thick-film and thin-film
fabrication technologies and ease of integration in silicon
integrated circuits. A three dimensional thick-film structure in
the form of a free-standing cantilever incorporated with
piezoelectric materials is proposed in this work. The advantages of
this structure include minimising the movement constraints on the
piezoelectric, thereby maximising the electrical output and
offering the ability for integration with other microelectronic
devices.
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