Rapid thermal processing has contributed to the development of
single wafer cluster processing tools and other innovations in
integrated circuit manufacturing environments. Borisenko and
Hesketh review theoretical and experimental progress in the field,
discussing a wide range of materials, processes, and conditions.
They thoroughly cover the work of international investigators in
the field.
General
Is the information for this product incomplete, wrong or inappropriate?
Let us know about it.
Does this product have an incorrect or missing image?
Send us a new image.
Is this product missing categories?
Add more categories.
Review This Product
No reviews yet - be the first to create one!
Welcome to Loot.co.za!
Sign in / Register |Wishlists & Gift Vouchers |Help | Advanced search
