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Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors

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Rapid Thermal Processing of Semiconductors (Hardcover, 1997 ed.) Loot Price: R6,789
Discovery Miles 67 890
Repayment Terms: R636 pm x 12*
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Rapid Thermal Processing of Semiconductors (Hardcover, 1997 ed.): Victor E. Borisenko, Peter J. Hesketh

Rapid Thermal Processing of Semiconductors (Hardcover, 1997 ed.)

Victor E. Borisenko, Peter J. Hesketh

Series: Microdevices

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Loot Price R6,789 Discovery Miles 67 890 | Repayment Terms: R636 pm x 12*

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

General

Imprint: Kluwer Academic / Plenum Publishers
Country of origin: United States
Series: Microdevices
Release date: May 1997
First published: 1997
Authors: Victor E. Borisenko • Peter J. Hesketh
Dimensions: 254 x 178 x 26mm (L x W x T)
Format: Hardcover
Pages: 358
Edition: 1997 ed.
ISBN-13: 978-0-306-45054-9
Categories: Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Electronic devices & materials > Semi-conductors & super-conductors
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LSN: 0-306-45054-2
Barcode: 9780306450549

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