The first publication of its kind in the field, this book describes
comprehensively and systematically radio-frequency (rf) capacitive
gas discharges of intermediate and low pressure and their
application to gas laser excitation and to plasma processing. Text
presents the physics underlying rf discharges along with techniques
for obtaining such discharges, experimental methods and results,
and theoretical and numerical modeling findings. Radio-Frequency
Capacitive Discharges is written by well-known specialists in the
field, authors of many theoretical and experimental works. They
provide simple and clear discussions of complicated physical
phenomena. A complete review on the state of the art is included.
This interesting new book can be used as a textbook for students
and postgraduates and as a comprehensive guidebook by specialists.
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