Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems. Research in the MEMS/NEMS and lab-on-chip fields has seen rapid growth in both academic and industrial domains, as these biodevices and systems are increasingly replacing traditional large size diagnostic tools. This book is unique in describing not only the devices and technologies but also the basic principles of their operation. The comprehensive description of the fabrication, packaging and principles of micro/nano biosystems presented in this book offers guidance for researchers designing and implementing these biosystems across diverse fields including medical, pharmaceutical and biological sciences. The book provides a detailed overview of the fundamental mechanical, optical, electrical and magnetic principles involved, together with the technologies required for the design, fabrication and characterization of micro/nano fluidic systems and bio-devices. Written by a collaborative team from France and Korea, the book is suitable for academics, researchers, advanced level students and industrial manufacturers.

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems. Research in the MEMS/NEMS and lab-on-chip fields has seen rapid growth in both academic and industrial domains, as these biodevices and systems are increasingly replacing traditional large size diagnostic tools. This book is unique in describing not only the devices and technologies but also the basic principles of their operation. The comprehensive description of the fabrication, packaging and principles of micro/nano biosystems presented in this book offers guidance for researchers designing and implementing these biosystems across diverse fields including medical, pharmaceutical and biological sciences. The book provides a detailed overview of the fundamental mechanical, optical, electrical and magnetic principles involved, together with the technologies required for the design, fabrication and characterization of micro/nano fluidic systems and bio-devices. Written by a collaborative team from France and Korea, the book is suitable for academics, researchers, advanced level students and industrial manufacturers.