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Defect engineering has come of age. That theme is well documented
by both the academic and industrial research communities in this
book from MRS. Going beyond defect control, the book explores the
engineering of desired properties in semiconductor materials and
devices through the deliberate introduction and manipulation of
defects and impurities. Papers are grouped around ten distinct
topics covering materials, processing and devices. Topics include:
grown-in defects in bulk crystals; grown-in defects in thin films;
gettering and related phenomena; hydrogen interaction with
semiconductors; defect issues in widegap semiconductors; defect
characterization; ion implantation and process-induced defects;
defects in devices; interfaces, quantum wells and superlattices;
and defect properties, reaction, activation and passivation.
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