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Energy-Filtering Transmission Electron Microscopy (EFTEM) presents
a summary of the electron optics, the electron-specimen
interactions, and the operation and contrast modes of this new
field of analytical electron microscopy. The electron optics of
filter lenses and the progress in the correction of aberrations are
discussed in detail. An evaluation of our present knowledge of
plasmon losses and inner-shell ionisations is of increasing
interest for a quantitative application of EFTEM in materials and
life sciences. This can be realized not only by filtering the
elastically scattered electrons but mainly by imgaging and
analyzing with inelastically scattered electrons at different
energy losses up to 2000 eV. The strength of EFTEM is the
combination of the modes EELS, ESI, ESD and REM.
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