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Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography... Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography (Paperback)
D. O. Filatov
R1,290 Discovery Miles 12 900
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This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

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