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The importance of surface metrology has long been acknowledged in
manufacturing and mechanical engineering, but has now gained
growing recognition in an expanding number of new applications in
fields such as semiconductors, electronics and optics. Metrology is
the scientific study of measurement, and surface metrology is the
study of the measurement of rough surfaces. In this book, Professor
David Whitehouse, an internationally acknowledged subject expert,
covers the wide range of theory and practice, including the use of
new methods of instrumentation.
- Written by one of the world's leading metrologists
- Covers electronics and optics applications as well as mechanical
- Written for mechanical and manufacturing engineers, tribologists
and precision engineers in industry and academia
The importance of surface metrology has long been acknowledged in
manufacturing and mechanical engineering, but has now gained
growing recognition in an expanding number of new applications in
fields such as semiconductors, electronics and optics. Metrology is
the scientific study of measurement, and surface metrology is the
study of the measurement of rough surfaces. In this book, Professor
David Whitehouse, an internationally acknowledged subject expert,
covers the wide range of theory and practice, including the use of
new methods of instrumentation.
.Written by one of the world's leading metrologists
.Covers electronics and optics applications as well as
mechanical
.Written for mechanical and manufacturing engineers, tribologists
and precision engineers in industry and academia
Since the publication of the first edition, miniaturization and
nanotechnology have become inextricably linked to traditional
surface geometry and metrology. This interdependence of scales has
had profound practical implications. Updated and expanded to
reflect many new developments, Handbook of Surface and
Nanometrology, Second Edition determines how the reduction in scale
of size from macro to nano has affected all aspects of surface use
and measurement. The book discusses how this shift has extended
through characterization, standardization, manufacture, and
performance. With nanotechnology now permeating the text, this
edition covers new methods of production and measurement as well as
new performance requirements. Described as the father of digital
metrology by the American Society for Precision Engineering, author
David J. Whitehouse explores the range of surface size
scales-macro, micro, nano, atomic, and combinations of these. He
examines traditional, structured, patterned, and free-form
surfaces, emphasizing the growing need to understand the behavior
of multiple surfaces. Still the definitive reference in the field,
the second edition of this handbook continues to provide in-depth,
extensive coverage of the engineering, physics, materials,
mathematics, and computing involved in surface metrology and
nanometrology. Nothing concerning current surface geometry escapes
inclusion or scrutiny in this book.
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