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The Handbook of Ellipsometry is a critical foundation text on an
increasingly critical subject. Ellipsometry, a measurement
technique based on phase and amplitude changes in polarized light,
is becoming popular in a widening array of applications because of
increasing miniaturization of integrated circuits and breakthroughs
in knowledge of biological macromolecules deriving from DNA and
protein surface research. Ellipsometry does not contact or damage
samples, and is an ideal measurement technique for determining
optical and physical properties of materials at the nano scale.
With the acceleration of new instruments and applications now
occurring, this book provides an essential foundation for the
current science and technology of ellipsometry for scientists and
engineers in industry and academia at the forefront of
nanotechnology developments in instrumentation, integrated
circuits, biotechnology, and pharmaceuticals. Divided into four
parts, this comprehensive handbook covers the theory of
ellipsometry, instrumentation, applications, and emerging areas.
Experts in the field contributed to its twelve chapters, covering
various aspects of ellipsometry.
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