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The rapidly emerging fields of nanotechnology and nano-fabrication have enabled the creation of new sensors with dramatic improvements in sensitivity and range, along with substantial miniaturization. And, although there are many books on nanotechnology, recent advances in micro and nano-scale sensors and transducers are not adequately represented in most books. This book fills that gap. Micro- and Nano-Scale Sensors and Transducers provides a summary of the state of the art in sensor and transducer technology. Teaching you how to make more informed selections of sensors or transducers for particular applications, it describes the differences between new sensor and transducer technologies based on nanotechnology and nano-fabrication and the older or "classical" sensor technologies. The book presents the new structures of pressure sensors being used in such applications as mechanical pressure sensing, gas pressure sensing, and atmospheric pressure sensing. It illustrates the novel structures and characteristics of new motion and acceleration sensors. Describing highly sensitive miniature gas and smoke sensors based on nano-structured electrodes, the book presents novel techniques for detecting atmospheric moisture and moisture inside small electronic components. It also covers applications of optoelectronic and photonic sensors. The book examines multi-purpose biological and chemical analysis devices where each device is fully contained in one integrated circuit (Lab on a Chip) as well as other advanced chemical and biological sensors. It describes electric, magnetic, and RF / microwave sensors and their applications and also considers integrated sensor / actuator units and special-purpose sensors. Each chapter in the book includes a set of quizzes / short questions, along with answers.
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