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One of the first books to cover advanced silicon-based
technologies, Advanced Silicon and Semiconducting Silicon
Alloy-Based Materials and Devices presents important directions for
research into silicon, its alloy-based semiconducting devices, and
its development in commercial applications. The first section deals
with single/mono crystalline silicon, focusing on the effects of
heavy doping; the structure and electronic properties of defects
and their impact on devices; the MBE of silicon, silicon alloys,
and metals; CVD techniques for silicon and silicon germanium; the
material properties of silicon germanium strained layers; silicon
germanium heterojunction bipolar applications; FETs, IR detectors,
and resonant tunneling devices in silicon, silicon germanium, and
d-doped silicon; and the fascinating properties of crystalline
silicon carbide and its applications. The second section explores
polycrystalline silicon. It examines large grain polysilicon
substrates for solar cells; the properties, analysis, and modeling
of polysilicon TFTs; the technology of polysilicon TFTs in LCD
displays; and the use of polycrystalline silicon and its alloys in
VLSI applications. With contributors from leading academic and
industrial research centers, this book provides wide coverage of
fabrication techniques, material properties, and device
applications.
One of the first books to cover advanced silicon-based
technologies, Advanced Silicon and Semiconducting Silicon
Alloy-Based Materials and Devices presents important directions for
research into silicon, its alloy-based semiconducting devices, and
its development in commercial applications. The first section deals
with single/mono crystalline silicon, focusing on the effects of
heavy doping; the structure and electronic properties of defects
and their impact on devices; the MBE of silicon, silicon alloys,
and metals; CVD techniques for silicon and silicon germanium; the
material properties of silicon germanium strained layers; silicon
germanium heterojunction bipolar applications; FETs, IR detectors,
and resonant tunneling devices in silicon, silicon germanium, and
d-doped silicon; and the fascinating properties of crystalline
silicon carbide and its applications. The second section explores
polycrystalline silicon. It examines large grain polysilicon
substrates for solar cells; the properties, analysis, and modeling
of polysilicon TFTs; the technology of polysilicon TFTs in LCD
displays; and the use of polycrystalline silicon and its alloys in
VLSI applications. With contributors from leading academic and
industrial research centers, this book provides wide coverage of
fabrication techniques, material properties, and device
applications.
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