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A comprehensive review of ion beam application in modern materials
research is provided, including the basics of ion beam physics and
technology. The physics of ion-solid interactions for ion
implantation, ion beam synthesis, sputtering and nano-patterning is
treated in detail. Its applications in materials research,
development and analysis, developments of special techniques and
interaction mechanisms of ion beams with solid state matter result
in the optimization of new material properties, which are discussed
thoroughly. Solid-state properties optimization for functional
materials such as doped semiconductors and metal layers for
nano-electronics, metal alloys, and nano-patterned surfaces is
demonstrated. The ion beam is an important tool for both materials
processing and analysis. Researchers engaged in solid-state physics
and materials research, engineers and technologists in the field of
modern functional materials will welcome this text.
A comprehensive review of ion beam application in modern materials
research is provided, including the basics of ion beam physics and
technology. The physics of ion-solid interactions for ion
implantation, ion beam synthesis, sputtering and nano-patterning is
treated in detail. Its applications in materials research,
development and analysis, developments of special techniques and
interaction mechanisms of ion beams with solid state matter result
in the optimization of new material properties, which are discussed
thoroughly. Solid-state properties optimization for functional
materials such as doped semiconductors and metal layers for
nano-electronics, metal alloys, and nano-patterned surfaces is
demonstrated. The ion beam is an important tool for both materials
processing and analysis. Researchers engaged in solid-state physics
and materials research, engineers and technologists in the field of
modern functional materials will welcome this text.
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