This book presents readers with the latest research in interferometry. Chapters include research done on an approach that can be used to identify the performance of coherence scanning interferometers in the presence of vibration; the permeability engineering of semiconductor photonic devices; several interferometric structures based on bulk optics to achieving optical interleaving; interference lithography; recent results on laser surface patterning using interferometers and femtosecond laser radiation; the realisation of the optical interferometers with the optical MEMS technology; a simple two-ray interferometer tuned by rotation; tuning of interference pattern period by rotation of an interferometer itself; the characteristics of a two-ray interferometer with fixed mirrors; the detection of acoustic fields from bounded ultrasonic beams by using laser interferometry techniques; and the use of lateral shearing interferometry as an important area of general interferometry.