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Monitoring hazardous gases is highly complex, yet critical to
semiconductor manufacturing. This book includes excerpts from codes
and standards relevant to the industry, including the latest
editions of model fire codes. This guide provides the basics to
successfully comply with code requirements.
The guidelines in this book go beyond minimum design standards to
ensure that best industry practices are employed to address the
many safety, environmental and economic concerns of hazardous
occupancy facilities. System certification, redundancy and
integration of gas sensors into a monitoring, control and alarm
system are discussed.
This is a field-guide reference. It is spiral-bound for easier
""benchtop"" access to the information you need while setting up
your gas monitoring systems. It is valuable to everyone involved in
handling hazardous gases.
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