|
Showing 1 - 3 of
3 matches in All Departments
This monograph arose out of the recognition of the importance of
hydrogen in modern semiconductor technology. Hydrogen is a
component of most chemicals used in the fabrication of electronic
and photonic devices, is easily incorporated into semiconductors
and it is a model impurity for studying defect reactions in solids.
While writing this volume we have received a good deal of encourage
ment from our colleagues at AT&T Bell Laboratories, State
University of New York at Albany and Lehigh University, and from
collaborators at other institutions: to them we extend our sincere
appreciation. In particular we would like to thank W. e.
Dautremont-Smith, J. Lopata, V. Swamina than, K. Bergman, L. e.
Synder, P. Deak, J. T. Borenstein, T. S. Shi, D. Tul chinsky, G. G.
DeLeo, W. B. Fowler, G. D. Watkins and D. Kozuch for their crucial
contributions to this work. We would also like to thank Mrs. Danuta
Sowinska-Kahn for her unfailing expertise in preparing much of the
art work. Finally we owe a great debt to Helmut Lotsch of
Springer-Verlag for his initial suggestion to write this book and
then his patient and professional guidance in seeing the project to
fruition. Murray Hill, NJ S. J. Pearton Albany, NY J. w. Corbett
Bethlehem, P A M. Stavola October 1991 v Contents 1. Introduction .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.
Hydrogen Incorporation in Crystalline Semiconductors 4 2. l
Techniques for Hydrogen Incorporation in Semiconductors . . . . . .
. . . . . . . . . . . . . . . . . 5 2. 1. 1 Hydrogen Plasma
Exposure. . . . . . . . . . . . . . . . . . . 5 2. l. 2 Hydrogen
Implantation . . . . . . ."
Since its inception in 1966, the series of numbered volumes known
as Semiconductors and Semimetals has distinguished itself through
the careful selection of well-known authors, editors, and
contributors.The"Willardson and Beer"Series, as it is widely known,
has succeeded in publishing numerous landmark volumes and chapters.
Not only did many of these volumes make an impact at the time of
their publication, but they continue to be well-cited years after
their original release. Recently, Professor Eicke R. Weber of the
University of California at Berkeley joined as a co-editor of the
series. Professor Weber, a well-known expert in the field of
semiconductor materials, will further contribute to continuing the
series' tradition of publishing timely, highly relevant, and
long-impacting volumes. Some of the recent volumes, such as
Hydrogen in Semiconductors, Imperfections in III/V Materials,
Epitaxial Microstructures, High-Speed Heterostructure Devices,
Oxygen in Silicon, and others promise indeed that this tradition
will be maintained and even expanded.Reflecting the truly
interdisciplinary nature of the field that the series covers, the
volumes in Semiconductors and Semimetals have been and will
continue to be of great interest to physicists, chemists, materials
scientists, and device engineers in modern industry.
The MRS Symposium Proceeding series is an internationally
recognised reference suitable for researchers and practitioners.
|
You may like...
Loot
Nadine Gordimer
Paperback
(2)
R398
R330
Discovery Miles 3 300
|