The scaling of device dimensions with a simultaneous increase in functional density has imposed tremendous challenges for materials, technology, integration and reliability of interconnects. To meet requirements of the ITRS roadmap, new materials are being introduced at a faster pace in all functions of multilevel interconnects. The issues addressed in this book cannot be dispelled as simply selecting a low-k material and integrating it into a copper damascene process. The intricacies of the back end for sub-100nm technology include novel processing of low-k materials, employing pore-sealing techniques and capping layers, introducing advanced dielectric and diffusion barriers, and developing novel integration schemes. This is in addition to concerns of performance, yield, and reliability appropriate to nanoscaled interconnects. Although many challenges continue to impede progress along the ITRS roadmap, the contributions in this book confront them head-on. It provides a scientific understanding of the issues and stimulate new approaches to advanced multilevel interconnects.

"They say that the moon is made of green cheese," said Alice, stroking the lazy cat's belly. "Do you believe that, Snowball? Father says it's nothing more than a great white stone, and I suppose I ought to believe him; but really, how can one be sure without ever having been there?" So begins a truly extraordinary tale as Alice finds herself meeting all manner of strange creatures as she sets off on new adventures. This is a completely new story by R J Carter, but has been presented as if it were a lost Lewis Carroll manuscript, complete with annotations and original illustrations. This book is guaranteed to delight both children and adults.

"They say that the moon is made of green cheese," said Alice, stroking the lazy cat's belly. "Do you believe that, Snowball? Father says it's nothing more than a great white stone, and I suppose I ought to believe him; but really, how can one be sure without ever having been there?" So begins a truly extraordinary tale as Alice finds herself meeting all manner of strange creatures as she sets off on new adventures. This is a completely new story by R J Carter, but has been presented as if it were a lost Lewis Carroll manuscript, complete with annotations and original illustrations. This book is guaranteed to delight both children and adults.