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As the feature size of microelectronic devices approaches the deep
submicron regime, the process development and integration issues
related to gate stack and silicide processing are key challenges.
Gate leakage is rising due to direct tunneling. Power and
reliability concerns are expected to limit the ultimate scaling of
SiO2-based insulators to about 1.5nm. Gate insulators must not
deleteriously affect the interface quality, thermal stability,
charge trapping, or process integration. Metal gate materials and
damascene gates are being investigated, in conjunction with the
application of a high-permittivity gate insulator, to provide
sufficient device performance at ULSI dimensions. The silicidation
process is also coming under pressure. Narrow device widths and
decreasing junction depths are making the formation of low-leakage,
low-resistance silicide straps extremely difficult. Producing
shallower junctions via ion implantation is inhibited by transient
enhanced diffusion and low beam currents at low implantation
energies. Gate stack and contact film effects, such as point defect
injection, extended defect formation, and stress on ultrashallow
junction formation must be considered.
The diversity of subjects involved in marine corrosion and fouling
processes are evident in the approaches and techniques described in
this book. An improvized understanding of biologically influenced
corrosion and fouling processes is essential to the development of
better corrosion protection systems, and this book shows new
perspectives in our appreciation of these subjects. Equally,
powerful microscope imaging, surface spectroscopy and
electrochemical techniques have become available and are providing
new information on metal surfaces experiencing fouling or microbial
corrosion. Examples include confocal laser microscopy, scanning
probe microscopy, Fourier Transform infrared spectroscopy, scanning
electrochemical microscopy and scanning (or vibrating) reference
electrode techniques. Advances in knowledge of biocorrosion
processes have enabled improvements in corrosion monitoring and
protection strategies. Examples include metal or polymer coatings
and the use of corrosion inhibitors and biocides. This book aims to
provide a contribution to existing literature on biocorrosion in
the marine environment.
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