As the feature size of microelectronic devices approaches the deep submicron regime, the process development and integration issues related to gate stack and silicide processing are key challenges. Gate leakage is rising due to direct tunneling. Power and reliability concerns are expected to limit the ultimate scaling of SiO2-based insulators to about 1.5nm. Gate insulators must not deleteriously affect the interface quality, thermal stability, charge trapping, or process integration. Metal gate materials and damascene gates are being investigated, in conjunction with the application of a high-permittivity gate insulator, to provide sufficient device performance at ULSI dimensions. The silicidation process is also coming under pressure. Narrow device widths and decreasing junction depths are making the formation of low-leakage, low-resistance silicide straps extremely difficult. Producing shallower junctions via ion implantation is inhibited by transient enhanced diffusion and low beam currents at low implantation energies. Gate stack and contact film effects, such as point defect injection, extended defect formation, and stress on ultrashallow junction formation must be considered.

The diversity of subjects involved in marine corrosion and fouling processes are evident in the approaches and techniques described in this book. An improvized understanding of biologically influenced corrosion and fouling processes is essential to the development of better corrosion protection systems, and this book shows new perspectives in our appreciation of these subjects. Equally, powerful microscope imaging, surface spectroscopy and electrochemical techniques have become available and are providing new information on metal surfaces experiencing fouling or microbial corrosion. Examples include confocal laser microscopy, scanning probe microscopy, Fourier Transform infrared spectroscopy, scanning electrochemical microscopy and scanning (or vibrating) reference electrode techniques. Advances in knowledge of biocorrosion processes have enabled improvements in corrosion monitoring and protection strategies. Examples include metal or polymer coatings and the use of corrosion inhibitors and biocides. This book aims to provide a contribution to existing literature on biocorrosion in the marine environment.