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This book covers the state of the art of laser micro- and
nanotechnology. The physical fundamentals of different processes
and the application are presented. The book deals with different
materials like phase change and memory alloys, thin films, polymers
etc. New phenomena and mechanisms of laser-matter interaction in
nano-domains are explained. This book is helpful for students,
postgraduates, engineers and researches working not only in the
field of laser microtechnology but also in high-tech industry, like
photonics, microelectronics, information technology.
This book covers the state of the art of laser micro- and
nanotechnology. The physical fundamentals of different processes
and the application are presented. The book deals with different
materials like phase change and memory alloys, thin films, polymers
etc. New phenomena and mechanisms of laser-matter interaction in
nano-domains are explained. This book is helpful for students,
postgraduates, engineers and researches working not only in the
field of laser microtechnology but also in high-tech industry, like
photonics, microelectronics, information technology.
Laser-Assisted Microtechnology introduces the principles and
techniques of laser-assisted microtechnology with emphasis on
micromachining of thin films, microprocessing of materials,
maskless laser micropatterning and laser-assisted synthesis of
thin-film systems. The experimental and theoretical
physico-chemical basis of every technological process is presented
in detail. On the basis of some characteristic examples of
applications, the capabilities of the technological methods as well
as the optimum conditions for their realization are discussed. In
this second edition, besides the actualization of the literature, a
new chapter concerning the laser-assisted wet chemical micro
etching, has been added. This is a new method for direct 3D-micro
structuring of solids, with a number of potential applications.
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