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In this monograph, the authors reports the current advancement in
high frequency piezoelectric crystal micromachined ultrasound
transducers and arrays and their biomedical applications.
Piezoelectric ultrasound transducers operating at high frequencies
(> 20 MHz) are of increasing demand in recent years for medical
imaging and biological particle manipulation involved therapy. The
performances of transducers greatly rely on the properties of the
piezoelectric materials and transduction structures, including
piezoelectric coefficient (d), electromechanical coupling
coefficient (k), dielectric permittivity (e) and acoustic impedance
(Z). Piezo-composite structures are preferred because of their
relatively high electromechanical coupling coefficient and low
acoustic impedance. A number of piezo-composite techniques have
been developed, namely "dice and fill," "tape-casting," "stack and
bond," "interdigital phase bonding," "laser micromachining" and
"micro-molding". However, these techniques are either difficult to
achieve fine features or not suitable for manufacturing of high
frequency ultrasound transducers (> 20 MHz). The piezo-composite
micromachined ultrasound transducers (PC-MUT) technique discovered
over the last 10 years or so has demonstrated high performance high
frequency piezo-composite ultrasound transducers. In this
monograph, piezoelectric materials used for high frequency
transducers is introduced first. Next, the benefits and theory of
piezo composites is presented, followed by the design criteria and
fabrication methods. Biomedical applications using piezo composites
micromachined ultrasound transducers (PC-MUT) and arrays will also
be reported, in comparison with other ultrasound transducer
techniques. The final part of this monograph describes challenges
and future perspectives of this technique for biomedical
applications.
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