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As the field of Microsystems expands into more disciplines and new
applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal
management is becoming a critical issue in the operation of many
microdevices, including microelectronic chips.
As the field of Microsystems expands into more disciplines and new
applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal
management is becoming a critical issue in the operation of many
microdevices, including microelectronic chips.
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