This book provides a comprehensive monograph on gate stacks in
semiconductor technology. It covers the major latest developments
and basics and will be useful as a reference work for researchers,
engineers and graduate students alike. The reader will get a clear
view of what has been done so far, what is the state-of-the-art and
which are the main challenges ahead before we come any closer to a
viable Ge and III-V MOS technology.
General
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