Silicon Sensors and Actuators - The Feynman Roadmap (1st ed. 2022)

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom� to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap� instead of the “More-than-Moore� technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

General

Imprint:	Springer Nature Switzerland AG
Country of origin:	Switzerland
Release date:	April 2023
First published:	2022
Editors:	Benedetto Vigna • Paolo Ferrari • Flavio Francesco Villa • Ernesto Lasalandra • Sarah Zerbini
Dimensions:	235 x 155mm (L x W)
Pages:	997
Edition:	1st ed. 2022
ISBN-13:	978-3-03-080137-3
Categories:	Books
LSN:	3-03-080137-3
Barcode:	9783030801373

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