This book describes modern focused ion beam microscopes and
techniques and how they can be used to aid materials metrology and
as tools for the fabrication of devices that in turn are used in
many other aspects of fundamental metrology. Beginning with a
description of the currently available instruments including the
new addition to the field of plasma-based sources, it then gives an
overview of ion solid interactions and how the different types of
instrument can be applied. Chapters then describe how these
machines can be applied to the field of materials science and
device fabrication giving examples of recent and current activity
in both these areas.
General
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