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Introduction to Focused Ion Beam Nanometrology (Hardcover) Loot Price: R2,834
Discovery Miles 28 340
Repayment Terms: R266 pm x 12*
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Introduction to Focused Ion Beam Nanometrology (Hardcover): David C. Cox

Introduction to Focused Ion Beam Nanometrology (Hardcover)

David C. Cox

Series: IOP Concise Physics

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Loot Price R2,834 Discovery Miles 28 340 | Repayment Terms: R266 pm x 12*

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This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.

General

Imprint: Morgan & Claypool Publishers
Country of origin: United States
Series: IOP Concise Physics
Release date: October 2015
Authors: David C. Cox
Format: Hardcover
Pages: 104
ISBN-13: 978-1-64327-846-9
Categories: Books > Science & Mathematics > Science: general issues > Scientific standards
Books > Science & Mathematics > Science: general issues > Scientific equipment & techniques, laboratory equipment > General
Books > Professional & Technical > Technology: general issues > Instruments & instrumentation engineering > Engineering measurement & calibration
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LSN: 1-64327-846-0
Barcode: 9781643278469

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