Symposium S, Microelectromechanical Systems Materials and Devices
IV, held November 29 December 3 at the 2010 MRS Fall Meeting in
Boston, Massachusetts, focused on micro- and nanoelectromechanical
systems (MEMS/NEMS), technologies which were spawned from the
fabrication and integration of small-scale mechanical, electrical,
thermal, magnetic, fluidic, and optical sensors and actuators with
micro-electronic components. MEMS and NEMS have enabled performance
enhancements and manufacturing cost reductions in a number of
applications, including optical displays, acceleration sensing,
radio-frequency switching, drug delivery, chemical detection, and
power generation and storage. Although originally based on silicon
microelectronics, the reach of MEMS and NEMS has extended well
beyond traditional engineering materials, and now includes
nanomaterials (nanotubes, nanowires, nanoparticles), smart
materials (piezoelectric and ferroelectric materials, shape memory
alloys, pH-sensitive polymers), metamaterials, and biomaterials
(ceramic, metallic, polymeric, composite based implant materials).
While these new materials provide more freedom with regards to the
design space of MEMS and NEMS, they also introduce a number of new
fabrication and characterization challenges not previously
encountered with silicon-based technology."
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