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Crystal Growth and Evaluation of Silicon for VLSI and ULSI (Paperback)
Loot Price: R1,861
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Crystal Growth and Evaluation of Silicon for VLSI and ULSI (Paperback)
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Silicon, as a single-crystal semiconductor, has sparked a
revolution in the field of electronics and touched nearly every
field of science and technology. Though available abundantly as
silica and in various other forms in nature, silicon is difficult
to separate from its chemical compounds because of its reactivity.
As a solid, silicon is chemically inert and stable, but growing it
as a single crystal creates many technological challenges. Crystal
Growth and Evaluation of Silicon for VLSI and ULSI is one of the
first books to cover the systematic growth of silicon single
crystals and the complete evaluation of silicon, from sand to
useful wafers for device fabrication. Written for engineers and
researchers working in semiconductor fabrication industries, this
practical text: Describes different techniques used to grow silicon
single crystals Explains how grown single-crystal ingots become a
complete silicon wafer for integrated-circuit fabrication Reviews
different methods to evaluate silicon wafers to determine
suitability for device applications Analyzes silicon wafers in
terms of resistivity and impurity concentration mapping Examines
the effect of intentional and unintentional impurities Explores the
defects found in regular silicon-crystal lattice Discusses silicon
wafer preparation for VLSI and ULSI processing Crystal Growth and
Evaluation of Silicon for VLSI and ULSI is an essential reference
for different approaches to the selection of the basic
silicon-containing compound, separation of silicon as
metallurgical-grade pure silicon, subsequent purification,
single-crystal growth, and defects and evaluation of the deviations
within the grown crystals.
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