Handbook of Chemical Vapor Deposition - Principles, Technology and Applications (Hardcover, 2nd edition)

Plasma CVD and metallic-organic CVD (MOCVD) are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.

The new edition also chronicles the recent expansion of a number of materials produced by CVD, including copper, tungsten, diamond, silicon carbide and silicon nitride, titanium nitride, and others.

Key Features:

- Practical approach in the handbook stresses CVD use in industry, such as semiconductors, optoelectronics, optics, cutting tools, refractory fibers, filters, and man others

- Coverage of the chemistry and deposition techniques of new materials produced by CVD as been greatly expanded in the book

- Special focus on the rapid growth of two major CVD processes: plasma CVD and metallo-organic CVD

- Emphasizes the broad expansion of the use of CVD processes in today's industry, showing the reasons for the growth and the different appli-cations that have developed in the last few years

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