Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope (Hardcover, 1st ed. 2023)

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

General

Imprint:	Springer Verlag, Singapore
Country of origin:	Singapore
Release date:	April 2023
First published:	2023
Authors:	Huiliang Cao
Dimensions:	235 x 155mm (L x W)
Format:	Hardcover
Pages:	224
Edition:	1st ed. 2023
ISBN-13:	978-981-19-9246-9
Categories:	Books > Professional & Technical > Transport technology > Aerospace & aviation technology > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Automatic control engineering > General
LSN:	981-19-9246-0
Barcode:	9789811992469

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