Materials and Processes for Submicron Technologies, Volume 89 (Hardcover)

The European Materials Society decided to hold a Symposium entitled "Materials and Processes for Submicron Technologies" in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France.
The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).

General

Imprint:	Elsevier Science Ltd
Country of origin:	United Kingdom
Series:	European Materials Research Society Symposia Proceedings
Release date:	November 1999
First published:	November 1999
Editors:	J.M. Martinez-Duart • R. Madar • R.A. Levy
Dimensions:	279 x 210mm (L x W)
Format:	Hardcover
Pages:	180
ISBN-13:	978-0-08-043617-3
Categories:	Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Circuits & components
LSN:	0-08-043617-X
Barcode:	9780080436173

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