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CMOS VLSI Engineering - Silicon-on-Insulator (SOI) (Hardcover, 1998 ed.)
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CMOS VLSI Engineering - Silicon-on-Insulator (SOI) (Hardcover, 1998 ed.)
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Silicon-On-Insulator (SOI) CMOS technology has been regarded as
another major technology for VLSI in addition to bulk CMOS
technology. Owing to the buried oxide structure, SOI technology
offers superior CMOS devices with higher speed, high density, and
reduced second order effects for deep-submicron low-voltage,
low-power VLSI circuits applications. In addition to VLSI
applications, and because of its outstanding properties, SOI
technology has been used to realize communication circuits,
microwave devices, BICMOS devices, and even fiber optics
applications. CMOS VLSI Engineering: Silicon-On-Insulator addresses
three key factors in engineering SOI CMOS VLSI - processing
technology, device modelling, and circuit designs are all covered
with their mutual interactions. Starting from the SOI CMOS
processing technology and the SOI CMOS digital and analog circuits,
behaviors of the SOI CMOS devices are presented, followed by a CAD
program, ST-SPICE, which incorporates models for deep-submicron
fully-depleted mesa-isolated SOI CMOS devices and special purpose
SOI devices including polysilicon TFTs. CMOS VLSI Engineering:
Silicon-On-Insulator is written for undergraduate senior students
and first-year graduate students interested in CMOS VLSI. It will
also be suitable for electrical engineering professionals
interested in microelectronics.
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