"Control from MEMS to Atoms" illustrates the use of control and
control systems as an essential part of functioning integrated
systems. The book is organized according to the dimensional scale
of the problem, starting with micro-scale systems and ending with
atomic-scale systems. Similar to macro-scale machines and
processes, control systems can play a major role in improving the
performance of micro- and nano-scale systems and in enabling new
capabilities that would otherwise not be possible. However, the
majority of problems at these scales present many new challenges
that go beyond the current state-of-the-art in control engineering.
This is a result of the multidisciplinary nature of
micro/nanotechnology, which requires the merging of control
engineering with physics, biology and chemistry.
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