Research and development in the area of Power MEMS has been driven
by the need for compact power sources with high energy and power
density. The seminal research in the field has been conducted at
Massachusetts Institute of Technology (MIT). Multi-Wafer Rotating
MEMS Machines: Turbines, Generators, and Engines describes the
collaboration and research that was developed to produce the MIT
Gas Turbine Engine. The MIT Gas Turbine Engine is intended to be a
power MEMS device that will produce 10 Watts or more of electrical
power from a shirt-button-sized package. This device is a
gas-turbine engine that drives an integrated electric generator.
Both the engine and generator are fabricated from silicon using a
combination of bulk and surface microfabrication technologies. The
book will discuss the technical details that have gone into
producing the engine and the overall systems-level tradeoffs and
decisions that have been made.
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