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Shape and Functional Elements of the Bulk Silicon Microtechnique - A Manual of Wet-Etched Silicon Structures (Paperback, Softcover reprint of hardcover 1st ed. 2005)
Loot Price: R3,731
Discovery Miles 37 310
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Shape and Functional Elements of the Bulk Silicon Microtechnique - A Manual of Wet-Etched Silicon Structures (Paperback, Softcover reprint of hardcover 1st ed. 2005)
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The idea for this manual was created by the author and Birgit
Hannemann (now Professor at the University of Applied Sciences,
Bremen, Germany) as an internal catalogue of results of several
years of investigations at the Chemnitz University of Technology,
Germany. At this base supplying investigations and the elabo- tion
of the manuscript were supported by the Stiftung
Industrieforschung, Bonn, Germany. In the course of this the
coworkers of the author Eva Gartner, Steffi Kronert and Cornelia
Kowol were directly involved. All the SEM pictures result from
preparations performed at the Centre of - crotechnologies at the
Chemnitz University of Technology (Head: Prof. Thomas Gessner). The
author and his coworkers wish to express their thanks to Wolfgang
Brauer (mask design), Norbert Zichner (processes), Iris Hobelt (SEM
pictures) and the student Karin Preissler (manuscript layout
support). In particular thanks are due to the Stiftung
Industrieforschung for the financial support and to the Springer V-
lag for the edition of this manual."
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