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Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > Microwave technology
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A Guide to Hands-on MEMS Design and Prototyping (Paperback)
Loot Price: R1,159
Discovery Miles 11 590
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A Guide to Hands-on MEMS Design and Prototyping (Paperback)
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Whether you are a student taking an introductory MEMS course or a
practising engineer who needs to get up to speed quickly on MEMS
design, this practical guide provides the hands-on experience
needed to design, fabricate and test MEMS devices. You will learn
how to use foundry multi-project fabrication processes for low-cost
MEMS projects, as well as computer-aided design tools (layout,
modeling) that can be used for the design of MEMS devices. Numerous
design examples are described and analysed, from fields including
micro-mechanics, electrostatics, optical MEMS, thermal MEMS and
fluidic MEMS. There's also a final chapter on packaging and testing
MEMS devices, as well as exercises and design challenges at the end
of every chapter. Solutions to the design challenge problems are
provided online.
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