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High Resolution Focused Ion Beams: FIB and its Applications - The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology (Paperback, Softcover reprint of the original 1st ed. 2003)
Loot Price: R6,052
Discovery Miles 60 520
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High Resolution Focused Ion Beams: FIB and its Applications - The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology (Paperback, Softcover reprint of the original 1st ed. 2003)
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In this book, we have attempted to produce a reference on high
resolution focused ion beams (FIBs) that will be useful for both
the user and the designer of FIB instrumentation. We have included
a mix of theory and applications that seemed most useful to us. The
field of FIBs has advanced rapidly since the application of the
first field emission ion sources in the early 1970s. The
development of the liquid metal ion source (LMIS) in the late 1960s
and early 1970s and its application for FIBs in the late 1970s have
resulted in a powerful tool for research and for industry. There
have been hundreds of papers written on many aspects of LMIS and
FIBs, and a useful and informative book on these subjects was
published in 1991 by Phil Prewett and Grame Mair. Because there
have been so many new applications and uses found for FIBs in the
last ten years we felt that it was time for another book on the
subject.
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