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Particles on Surfaces: Detection, Adhesion and Removal, Volume 8 (Hardcover)
Loot Price: R11,335
Discovery Miles 113 350
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Particles on Surfaces: Detection, Adhesion and Removal, Volume 8 (Hardcover)
Expected to ship within 12 - 17 working days
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This volume documents the proceedings of the 8th International
Symposium on Particles on Surfaces: Detection, Adhesion and Removal
held in Providence, Rhode Island, June 2426, 2002.
The study of particles on surfaces is extremely crucial in a host
of diverse technological areas, ranging from microelectronics to
optics to biomedical. In a world of shrinking dimensions and with
the tremendous interest in various nanotechnologies, the need to
understand the physics of nanoparticles becomes quite patent. With
the interest in and concern with nanoparticles comes the need for
new and more sensitive metrological and analysis techniques to
detect, quantitate, analyze and characterize very small particles
on a host of substrates.
This volume contains a total of 21 papers covering many
ramifications of particles on surfaces. All manuscripts were
rigorously peer-reviewed and all were revised and properly edited
before inclusion in this volume. The book is divided into two
parts: Particle Analysis/Characterization and General
Cleaning-Related Topics and Particle Adhesion and Removal. The
topics covered include: nature and characterization of small
particles; surface and micro-analytical methods for particle
identification; haze as a new method to monitor nano-sized
particles; particle transport and adhesion in ion-beam sputter
deposition process; particle deposition during immersion rinsing;
ice-air blast cleaning; rectangular jets for surface
decontamination; factors important in particle adhesion and
removal; mechanics of nanoparticle adhesion; particle adhesion on
nanoscale rough surfaces; various techniques for cleaning or
removal of particles from different substrates including
wetcleaning, use of modified SC-1 solutions, use of surfactants,
ozonated DI water, ultrasonic, megasonic, laser, energetic
clusters; and post-CMP cleaning.
This volume, together with its predecessors, will be of immense
value to anyone interested in the world of particles on surfaces,
and will serve as a resource for information on contemporary
R&D activity in this extremely technologically important
area.
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