This thoroughly updated new edition includes an entirely new
team of contributing authors with backgrounds specializing in the
various new applications of sputtering technology. It forms a
bridge between fundamental theory and practical application, giving
an insight into innovative new materials, devices and systems.
Organized into three parts for ease of use, this Handbook
introduces the fundamentals of thin films and sputtering
deposition, explores the theory and practices of this field, and
also covers new technology such as nano-functional materials and
MEMS.
Wide varieties of functional thin film materials and processing
are described, and experimental data is provided with detailed
examples and theoretical descriptions.
A strong applications focus, covering
current and emerging technologies, including nano-materials and
MEMS (microelectrolmechanical systems) for energy, environments,
communications, and/or bio-medical field. New chapters on computer
simulation of sputtering and MEMS completes the update and insures
that the new edition includes the most current and forward-looking
coverage available.
All applications discussed are supported by theoretical
discussions, offering readers both the "how" and the "why" of each
technique.
40% revision: the new edition includes an entirely new team of
contributing authors with backgrounds specializing in the various
new applications that are covered in the book and providing the
most up-to-date coverage available anywhere.
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