"Microelectronic Test Structures for CMOS Technology and
Products" addresses the basic concepts of the design of test
structures for incorporation within test-vehicles, scribe-lines,
and CMOS products. The role of test structures in the development
and monitoring of CMOS technologies and products has become ever
more important with the increased cost and complexity of
development and manufacturing. In this timely volume, IBM
scientists Manjul Bhushan and Mark Ketchen emphasize high speed
characterization techniques for digital CMOS circuit applications
and bridging between circuit performance and characteristics of
MOSFETs and other circuit elements. Detailed examples are presented
throughout, many of which are equally applicable to other
microelectronic technologies as well. The authors' overarching goal
is to provide students and technology practitioners alike a
practical guide to the disciplined design and use of test
structures that give unambiguous information on the parametrics and
performance of digital CMOS technology. "
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