From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and
Applications details manufacturing techniques applicable to
bionanotechnology. After reviewing MEMS techniques, materials, and
modeling, the author covers nanofabrication, genetically engineered
proteins, artificial cells, nanochemistry, and self-assembly. He
also discusses scaling laws in MEMS and NEMS, actuators, fluidics,
and power and brains in miniature devices. He concludes with
coverage of various MEMS and NEMS applications. Fully illustrated
in color, the text contains end-of-chapter problems, worked
examples, extensive references for further reading, and an
extensive glossary of terms. Details the Nanotechnology, Biology,
and Manufacturing Techniques Applicable to Bionanotechnology Topics
include: Nonlithography manufacturing techniques with
lithography-based methods Nature as an engineering guide and
contrasts top-down and bottom-up approaches Packaging, assembly,
and self-assembly from ICs to DNA and biological cells Selected new
MEMS and NEMS processes and materials, metrology techniques, and
modeling Scaling laws, actuators, power generation, and the
implementation of brains in miniaturizes devices Different
strategies for making micromachines smarter The transition out of
the laboratory and into the marketplace The third volume in
Fundamentals of Microfabrication and Nanotechnology, Third Edition,
Three-Volume Set, the book discusses top-down and bottom-up
manufacturing methods and explains how to use nature as a guide. It
provides a better understanding of how to match different
manufacturing options with a given application that students can
use to identify additional killer MEMS and NEMS applications. Other
volumes in the set include: Solid-State Physics, Fluidics, and
Analytical Techniques in Micro- and Nanotechnology Manufacturing
Techniques for Microfabrication and Nanotechnology
General
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