An Introduction to Microelectromechanical Systems Engineering (Hardcover)

Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using techniques such as oxidation, lithography, chemical vapor deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defense. A unique element of this book is its look at the future of MEMS -- its potential for microelectrode arrays, actuators and optical switches and other technologies.

General

Imprint:	Artech House Publishers
Country of origin:	United States
Series:	Microelectromechanical Systems S.
Release date:	November 1999
First published:	1999
Authors:	Nadim Maluf
Dimensions:	229 x 152 x 20mm (L x W x T)
Format:	Hardcover - Laminated cover
Pages:	292
ISBN-13:	978-0-89006-581-5
Categories:	Books > Professional & Technical > Mechanical engineering & materials > Mechanical engineering > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General
LSN:	0-89006-581-0
Barcode:	9780890065815

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