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Books > Professional & Technical > Mechanical engineering & materials > Mechanical engineering
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An Introduction to Microelectromechanical Systems Engineering (Hardcover)
Loot Price: R2,277
Discovery Miles 22 770
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An Introduction to Microelectromechanical Systems Engineering (Hardcover)
Series: Microelectromechanical Systems S.
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Here's the first non-technical introduction to the exciting field
of microelectromechanical systems (MEMS). It describes in detail
the materials used in producing MEMS -- including silicon, polymers
and glass and quartz substrates -- as well as MEMS design for
nozzles, sensors, valves and other applications. It examines the
manufacture of commercial MEMS using techniques such as oxidation,
lithography, chemical vapor deposition and silicon fusion bonding
and applications in a wide range of industries including data
storage, telecommunications, consumer, automotive, medical and
defense. A unique element of this book is its look at the future of
MEMS -- its potential for microelectrode arrays, actuators and
optical switches and other technologies.
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