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Books > Professional & Technical > Mechanical engineering & materials > Materials science
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Cmos-mems (Paperback)
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Cmos-mems (Paperback)
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This edition of 'CMOS-MEMS' was originally published in the
successful series 'Advanced Micro & Nanosystems'. Here, the
combination of the globally established, billion dollar chip mass
fabrication technology CMOS with the fascinating and commercially
promising new world of MEMS is covered from all angles. The book
introduces readers to this fi eld and takes them from fabrication
technologies and material charaterization aspects to the actual
applications of CMOS-MEMS - a wide range of miniaturized physical,
chemical and biological sensors and RF systems. Vital knowledge on
circuit and system integration issues concludes this in-depth
treatise, illustrating the advantages of combining CMOS and MEMS in
the first place, rather than having a hybrid solution.
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