Reliability of MEMS - Testing of Materials and Devices (Hardcover)

This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

General

Imprint:	Wiley-VCH Verlag GmbH
Country of origin:	Germany
Series:	Advanced Micro and Nanosystems
Release date:	December 2007
First published:	February 2008
Editors:	Osamu Tabata • Toshiyuki Tsuchiya
Series editors:	Oliver Brand • Gary K. Fedder • Christofer Hierold • Jan G. Korvink
Dimensions:	249 x 181 x 21mm (L x W x T)
Format:	Hardcover
Pages:	324
ISBN-13:	978-3-527-31494-2
Categories:	Books > Professional & Technical > Mechanical engineering & materials > Materials science > General Books > Professional & Technical > Electronics & communications engineering > Electronics engineering > General
LSN:	3-527-31494-6
Barcode:	9783527314942

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