This book is designed as an introduction for the graduate students
and researchers who want to understand the trends of MEMS materials
and devices. Particularly, this book describes the experimental
view of the fabrication of a thin membrane over a conical V-shaped
cavity using front side lateral etching technology that proposes a
novel front side etching fabrication process for silicon based
piezoresistive micro- pressure sensor. As far as the fabrication
process is concerned, this technique successfully accomplished a
front side etching process laterally to replace the conventional
back-side bulk micro-machining. This novel structure of micro
pressure sensor can achieve the distinguishing features of the chip
size reduction and fabrication costs degradation. This book covers
the principles, tools and methods for determining the reliability
of micro-electro-mechanical (MEMS)materials, components and
devices. Hopefully, this book will be very beneficial to the
students of MEMS and NEMS courses.
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