Various statistical features can be used to characterize the
surface in quantitative way. Such an analysis can be done by the
multi-resolution capabilities of wavelet transforms (WT) of the
surface microscopic image. A multi-scale molecular model can help
to investigate the physical and chemical mechanism in manufacturing
process. Multiresolution characterization can be performed on the
model structure to compare with image analysis. In this book, we
have used a soft polymeric surface and applied multiresolution
characterization for surface feature extraction and multiscale
modeling for optimizing system variables to get desired surface
characteristics. In microfabrication, the efficiency of the product
reduced by line-edge roughness (LER). Off-line LER characterization
is usually based on the top-down SEM image. This book shows wavelet
based segmentation method for edge searching region as well as
wavelet based characterization. For mesoscale modeling, the
Flory-Huggins interaction parameters of the clusters of atoms or
molecules are used. We have identified the phase separation by
spinodal decomposition resulting in the formation of LER on polymer
surface.
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