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Ion Implantation for High-Efficiency Silicon Solar Cells. (Paperback)
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Ion Implantation for High-Efficiency Silicon Solar Cells. (Paperback)
Series: Solare Energie- Und Systemforschung
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The profitability of the whole photovoltaic system can be
effectively increased by the use of advanced silicon solar cells
with a higher conversion efficiency potential and new technologies
are needed to keep the fabrication effort low. Ion implantation
allows for single side and even patterned doping of silicon wafers,
so this technique could help to simplify the process chain of
complex high-efficiency silicon solar cells. In this thesis, the
suitability of ion implantation for the fabrication of modern solar
cells was investigated. The implantation of mass-separated boron or
phosphorus ions and subsequent furnace annealing was used to study
the charge carrier recombination due to implantation defects and
obtain doping profiles for an evaluation at the device level.
Furthermore, novel process sequences combining ion implantation and
furnace diffusion for the simplified doping of back-junction
back-contact cells were developed and evaluated with respect to the
influence of a reverse breakdown and a weak front-side doping on
the solar cell performance.
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